Utilities & Environmental Monitoring
Temperature
22.5°C
Target: 22.0°C
Humidity
45%
Target: 45%
Pressure
15 Pa
Target: 15 Pa
Particle Count
100
Particles/m³
Main HVAC Systemoperational
Temperature
22.5°C
Humidity
45%
Airflow
0.45 m/s
Pressure
15 Pa
Filter Status
clean
Last Changed: 2024-03-15
Cleanroom HVACoperational
Temperature
21°C
Humidity
40%
Airflow
0.5 m/s
Pressure
20 Pa
Filter Status
clean
Last Changed: 2024-03-10